V. P. Pronin, D. M. Dolgintsev, S. V. Senkevich, E. Y. Kaptelov, I. P. Pronin
Price: 50 руб.
We have studied the possibilities of electron-probe X-ray microanalysis
(EPMA) using the EVO-40 scanning electron microscope for determining the composition of multicomponent thin layers based on solid solutions of lead zirconate titanate (PZT). We have established that analysis of the composition of thin PZT layers deposited on a platinized silicon substrate is hampered by the proximity of characteristic x-ray lines of
platinum and zirconium. This leads to a distortion in determining the
content of not only zirconium, but also lead and titanium. To reliably
determine the composition of such films, it is necessary to use a control
sample of PZT deposited on a substrate without platinum.
Keywords: electronprobe X-ray microanalysis, thin PZT film, thin film.
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